Preparation method of palladium alloy composite membrane for hydrogen separation

摘要

Disclosed herein is a method of preparing a palladium alloy composite membrane for hydrogen separation, including (a) providing a first metal coating layer on a porous support using a dry sputtering deposition process; (b) providing a palladium coating layer on the first metal coating layer using a dry sputtering deposition process; and (c) heat treating the palladium coating layer to form an alloy layer of palladium and the first metal.