| 摘要 |
A stage apparatus includes a stage over which a substrate is to be transferred, and a levitation mechanism which levitates the substrate over the stage. The stage includes a plurality of gas spray ports (16a) to spray a gas for levitating the substrate (G), and a plurality of suction ports (16b) to take in air sprayed from the gas spray ports (16a). The plurality of gas spray ports (16a) and the plurality of suction ports (16b) are set not to be arranged on straight lines parallel to a substrate transfer direction in a predetermined length along the substrate transfer direction.
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