发明名称 |
Electronic device including MEMS devices and holed substrates, in particular of the LGA or BGA type |
摘要 |
An electronic device includes a substrate provided with a passing opening and a MEMS device including an active surface wherein a portion of the MEMS device is integrated sensitive to chemical/physical variations of a fluid. The active surface of the MEMS device faces the substrate and is spaced therefrom, the sensitive portion being aligned to the opening. A protective package incorporates at least partially the MEMS device and the substrate, leaving at least the sensitive portion of the MEMS device, and the opening of the substrate exposed. A barrier element is positioned in an area which surrounds the sensitive portion to realize a protection structure for the MEMS device, so that the sensitive portion is free.
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申请公布号 |
US7875942(B2) |
申请公布日期 |
2011.01.25 |
申请号 |
US20080006819 |
申请日期 |
2008.01.04 |
申请人 |
STMICROELECTRONICS, S.R.L.;STMICROELECTRONICS (MALTA) LTD. |
发明人 |
CORTESE MARIO;AZZOPARDI MARK ANTHONY;MYERS EDWARD;COMBI CHANTAL;BALDO LORENZO |
分类号 |
H01L29/84 |
主分类号 |
H01L29/84 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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