发明名称 |
Polishing pad |
摘要 |
A polishing pad provides excellent optical detection accuracy properties over a broad wavelength range (particularly at the short-wavelength side) and is capable of preventing a slurry from leaking from the boundary between a polishing region and a light-transmitting region. The polishing pad includes at least a transparent support film laminated on one side of a polishing layer including a polishing region and a light-transmitting region; the light transmittance of an optical detection region containing at least the light-transmitting region and the transparent support film is 40% or more in the overall range of wavelengths of 300 to 400 nm.
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申请公布号 |
US7874894(B2) |
申请公布日期 |
2011.01.25 |
申请号 |
US20070294402 |
申请日期 |
2007.05.15 |
申请人 |
TOYO TIRE & RUBBER CO., LTD. |
发明人 |
FUKUDA TAKESHI;HIROSE JUNJI;NAKAI YOSHIYUKI;KIMURA TSUYOSHI |
分类号 |
B24B37/013;B24B37/20;B32B5/18;B32B27/40;H01L21/304 |
主分类号 |
B24B37/013 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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