ORGANIC LIGHT EMITTING DISPLAY DEVICE AND FABRICATION METHOD THEREOF
摘要
<p>PURPOSE: An organic electroluminescent display device and a manufacturing method thereof are provided to manufacture thin film transistors which have different properties through a single process by forming a lower gate structure oxide thin film transistor and an upper gate structure oxide thin film transistor through the same process. CONSTITUTION: A source/drain electrode of a first thin film transistor and the gate electrode of a second thin film transistor are formed on a substrate(10). A first insulation layer(12) is formed on the source/drain electrode of the first thin film transistor and the gate electrode of the second thin film transistor. A second insulation layer(14) is formed on a first and a second oxide semiconductor layer. A second via hole is formed by removing a part of the second insulation layer on the second oxide semiconductor.</p>