SYSTEM AND METHOD FOR AUTOMATICALLY GENERATING A TOOLING SPECIFICATION USING A LOGICAL OPERATIONS UTILITY THAT CAN BE USED TO GENERATE A PHTOMASK ORDER

摘要

A method of generating a photomask order used to manufacture photomasks using a tooling specification generating system including generating a tooling specification by creating, modifying and/or deleting components of a logical operation that is represented by the tooling specification. Information required for the logical operation may be imported from an external source, such as a database, and/or may be chosen from look-up lists. Aliases for the operators that make up expressions in the logical operation may be modified as desired by the photomask customer. The format of the tooling specification may be verified by the photomask customer's computer system. The tooling specification is sent to a computer system of a photomask manufacturer in various proprietary and industry standard formats for analysis of the tooling specification, and the photomask design may be simulated using the tooling specification. After receiving the analysis results, the photomask customer's computer system generates the photomask order based on the tooling specification. The photomask order is then sent to the computer system of a photomask manufacturer for manufacture of the photomask. The tooling specification generating system may be a stand-alone system or be integrated with a photomask order generating system.