| 摘要 |
PROBLEM TO BE SOLVED: To provide a glass substrate working device using a laser beam which can be achieved with inexpensive constitution.SOLUTION: The working device includes a work table 2 where a glass substrate is loaded, a laser beam output section 15, a diffraction optical element 32 and a condenser lens 35 for condensing the input laser beam at a plurality of points, a first hollow motor 17, a pair of wedge prisms 34a, 34b, and a second hollow motor 19. The first hollow motor 17 rotates a plurality of beam focus spots around the center axis of the plurality of laser beams emitted from the condenser lens 35. The pair of wedge prisms 34a, 34b deviates the axes of rotation of the plurality of beam focus spots from the center axes of the plurality of laser beams to be output from the condenser lens 35. The second hollow motor 19 performs rotation-scanning of the plurality of beam focus points deviated from the center axes around the center axes in a plane along the surface of the glass substrate of the work table 2. |
