| 摘要 |
PROBLEM TO BE SOLVED: To provide a multilayer-film-coated member which is coated with a hard film that has lubrication characteristics equal to that of DLC, high hardness and high heat resistance, and to provide a method for manufacturing the same.SOLUTION: The multilayer-film-coated member has two or more layers of hard films which have different compositions coated on the surface of a substrate. The composition of the hard film 1 is represented by SiaBuCvNwOz. The composition of the hard film 2 which is a lower layer of the hard film 1 has a metal component including two or more metals selected from Al, Ti, Cr, Nb, W, Si, V, Zr and Mo, and a non-metal component of N and at least one element selected from B, C, O and S. The hard film 1 has the peak intensity Ix that is the maximum intensity detected between 1,300 and 1,600 cmin Raman spectroscopic analysis and the peak intensity Iy that is the maximum intensity detected between 1,900 and 2,200 cm, which satisfy 3.2≤Ix/Iy≤8.0. |
