| 摘要 |
PROBLEM TO BE SOLVED: To provide a semiconductor device inspecting apparatus so that inspection result will not be affected, even by a slight inclination of pin terminals. SOLUTION: Pads 152 on the upper surface of a performance board 150, pads 153 on the lower surface, and pads 161 on the upper surface of a probe card 107 include a matrix form of innumerable projections 200. Even if the pin terminals 120, 130, 140 are inclined slightly due to assembling differences, etc., contact areas with the pads 152, 153, 161 will not be reduced in an extreme manner. COPYRIGHT: (C)2008,JPO&INPIT
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