CLEANING UNIT, TREATMENT SOLUTION COATING APPARATUS HAVING THE SAME AND CLEANING METHOD USING THE SAME

摘要

PURPOSE: A cleaning unit, a treatment solution spreading apparatus having the same, and a cleaning method using the same is provided to improve the cleaning efficiency and reduce the manufacturing cost. CONSTITUTION: A blade(164) has the shape of the sheet. The blade scratches and removes the solution remaining on the treatment solution discharging surface of a head discharging the solution. A first securing unit(165) is arranged opposing one surface of the blade. A fixed body is combined with the second fixing unit.