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发明名称
VORRICHTUNG UND VERFAHREN ZUR PLASMAVERARBEITUNG
摘要
申请公布号
DE602004030477(D1)
申请公布日期
2011.01.20
申请号
DE200460030477T
申请日期
2004.12.14
申请人
OXFORD INSTRUMENTS PLASMA TECHNOLOGY LTD.
发明人
SINGH, NITYALENDRA;CROAD, ROGER JAMES
分类号
H01J37/32
主分类号
H01J37/32
代理机构
代理人
主权项
地址
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