| 摘要 |
PURPOSE: A thermal flow meter is provided to make a flow sensor light and small by reduction in the weight of a movable head. CONSTITUTION: A thermal flow meter(10) comprises a sensor flow path, a bypass channel, a measuring chip, and a substrate(50). The sensor flow path is formed with a hotwire for the measurement of the flow rate of the fluid. The bypass channel is installed in order to cope with the sensor flow path. The hotwire is formed in the measuring chip. The substrate is formed with an electric circuit electrically connected to the measuring chip. The electrode of the measuring chip and the electrode of the substrate are welded by joining materials. The substrate is fixed to a body(20), receiving the substrate, by a coupling unit. |
