COMPOSITION FOR FORMING SILICON-CONTAINING FINE PATTERN AND METHOD FOR FORMING FINE PATTERN USING THE SAME,申请号EP20080830189-传众专利搜索

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发明名称	COMPOSITION FOR FORMING SILICON-CONTAINING FINE PATTERN AND METHOD FOR FORMING FINE PATTERN USING THE SAME
摘要
申请公布号	EP2199861(A4)	申请公布日期	2011.01.19
申请号	EP20080830189	申请日期	2008.09.12
申请人	AZ ELECTRONIC MATERIALS USA CORP.	发明人	DAMMEL, RALPH. R;KANG, WEN-BING;SHIMIZU, YASUO;ISHIKAWA, TOMONORI
分类号	G03F7/40;G03F7/075;H01L21/027	主分类号	G03F7/40
代理机构		代理人
主权项
地址

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