发明名称 VERFAHREN ZUR VERGRÖSSERUNG DER FLÄCHE EINER NÜTZLICHEN MATERIALSCHICHT, DIE AUF EINEN TRÄGER ÜBERTRAGEN WIRD
摘要 A composite structure in accordance with the invention includes front faces of first and second substrates that are molecularly bonded to each other, wherein the dimensions of the second substrate outline are larger than the first substrate outline. The front faces are molecularly bonded such that the outline of the first front face is disposed at least partially within the outline of the second front face. A peripheral ring extends around the first front face and facing the first substrate, in which bonding between the front faces is weak or absent, and has a maximum width of less than about 0.5 mm.
申请公布号 AT492028(T) 申请公布日期 2011.01.15
申请号 AT20030763892T 申请日期 2003.07.16
申请人 S.O.I.TEC SILICON ON INSULATOR TECHNOLOGIES 发明人 MALEVILLE, CHRISTOPHE
分类号 H01L21/762;H01L21/20;H01L33/00 主分类号 H01L21/762
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