发明名称 |
METHOD FOR TEXTURING SUBSTRATE FOR SOLAR CELL AND MEHTOD FOR MANUFACTURING SOLAR CELL |
摘要 |
PURPOSE: The texturing method of a solar cell board and a method for manufacturing a solar cell are provided to improve the productivity by reducing time required for forming a texturing surface. CONSTITUTION: A first texturing surface including a plurality of protrusions(115) is formed on one side of a substrate(110) using a dry etching method. An emitter part(120) is located on the texturing surface of the substrate. The first texturing surface is etched using the dry etching method, and a damaged part on a second texturing surface is eliminated. A third texturing surface including the plurality of protrusions with a first size is formed by etching the surface of the first texturing surface using first etching gas. A fourth texturing surface is formed by etching the surface of the third texturing surface using second etching gas. In the fourth texturing surface, the size of the protrusions is changed. |
申请公布号 |
KR20110003788(A) |
申请公布日期 |
2011.01.13 |
申请号 |
KR20090061233 |
申请日期 |
2009.07.06 |
申请人 |
LG ELECTRONICS INC. |
发明人 |
HA, MAN HYO;LEE, KYOUNG SOO;KIM, JONG HWAN |
分类号 |
H01L31/04;H01L31/0236 |
主分类号 |
H01L31/04 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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