发明名称 METHOD FOR TEXTURING SUBSTRATE FOR SOLAR CELL AND MEHTOD FOR MANUFACTURING SOLAR CELL
摘要 PURPOSE: The texturing method of a solar cell board and a method for manufacturing a solar cell are provided to improve the productivity by reducing time required for forming a texturing surface. CONSTITUTION: A first texturing surface including a plurality of protrusions(115) is formed on one side of a substrate(110) using a dry etching method. An emitter part(120) is located on the texturing surface of the substrate. The first texturing surface is etched using the dry etching method, and a damaged part on a second texturing surface is eliminated. A third texturing surface including the plurality of protrusions with a first size is formed by etching the surface of the first texturing surface using first etching gas. A fourth texturing surface is formed by etching the surface of the third texturing surface using second etching gas. In the fourth texturing surface, the size of the protrusions is changed.
申请公布号 KR20110003788(A) 申请公布日期 2011.01.13
申请号 KR20090061233 申请日期 2009.07.06
申请人 LG ELECTRONICS INC. 发明人 HA, MAN HYO;LEE, KYOUNG SOO;KIM, JONG HWAN
分类号 H01L31/04;H01L31/0236 主分类号 H01L31/04
代理机构 代理人
主权项
地址