申请人 |
LAM RESEARCH CORPORATION;JI, BING;TAKESHITA, KENJI;BAILEY, ANDREW D., III;HUDSON, ERIC A.;MORAVEJ, MARYAM;SIRARD, STEPHEN M.;KO, JUNGMIN;LE, DANIEL;HEFTY, ROBERT C.;CHENG, YU;DELGADINO, GERARDO A.;YEN, BI-MING |
发明人 |
JI, BING;TAKESHITA, KENJI;BAILEY, ANDREW D., III;HUDSON, ERIC A.;MORAVEJ, MARYAM;SIRARD, STEPHEN M.;KO, JUNGMIN;LE, DANIEL;HEFTY, ROBERT C.;CHENG, YU;DELGADINO, GERARDO A.;YEN, BI-MING |