发明名称 SURFACE TREATMENT APPARATUS
摘要 PROBLEM TO BE SOLVED: To provide a surface treatment apparatus which can treat the end region of the surface to be treated with high accuracy, while preventing a surface treatment liquid from flowing around a back face side of an article to be treated, which is not desired to be treated.SOLUTION: The surface treatment apparatus 1 is the apparatus 1 which treats the surface by making the treatment liquid X flow downward along the surface 16 to be treated of a sheet material 10, and has a part 3 for treating the end region, which has a face 17c for treating the end region. The face 17c for treating the end region is provided so as to face the surface 16 to be treated of the sheet material 10 with a minute gap between itself and the surface 16. A lower end 17a of the part 3 for treating the end region is arranged so as to contact a part of the treatment liquid X which flows on a face 13 of a supply guide.
申请公布号 JP2011006715(A) 申请公布日期 2011.01.13
申请号 JP20070279510 申请日期 2007.10.26
申请人 PANASONIC CORP 发明人 ITO IZUMI;ASADA HIROFUMI;OCHI SHINYA
分类号 C23C18/31;C25D21/00 主分类号 C23C18/31
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