| 摘要 |
PROBLEM TO BE SOLVED: To provide a flexural vibration piece having a configuration suitable for miniaturization, and to provide a method for manufacturing the flexural vibration piece.SOLUTION: A crystal vibration piece 1 includes: a base part 2; three vibration arms 3 each of which is extended from the base part 2 and has a first surface 6 and a second surface 7 disposed so as to turn to respective directions of flexural vibration; lower electrodes 11 and 12 which are formed on the first and second surfaces 6 and 7 of the vibration arms 3 and are mutually conductively connected; a piezoelectric film 14 formed so as to cover the lower electrodes 11 and 12; and upper electrodes 10 and 13 formed over the piezoelectric film 14. The piezoelectric film 14 (14a1, 14b1 and 14c1) formed over the first surfaces 6 (6a, 6b, and 6c) and the piezoelectric film 14 (14a2, 14b2 and 14c2) formed over the second surfaces 7 (7a, 7b and 7c) have opposite polarization directions with respect to the vibration arms 3 over which the piezoelectric film is formed. |
