RADIATION-SENSITIVE RESIN COMPOSITION

摘要

A radiation-sensitive resin composition comprising: (A) a resin containing an acid-labile group; (B) a radiation-sensitive acid generator; and (C) an acid diffusion regulator comprising (C1) a compound represented by general formula (1-1) (wherein R1 and R2 independently represent a hydrogen atom, or the like; and Rp represents an acid-labile group) and (C2) a compound represented by general formula (1-2) (wherein R3 represents a hydrogen atom, or the like; and R4 to R6 independently represent a hydrogen atom, or the like) or general formula (1-3) (wherein R3 represents a hydrogen atom, or the like; Rq represents a single bond, or the like; and R5 and R6 independently represent a hydrogen atom, or the like).