| 摘要 |
PROBLEM TO BE SOLVED: To provide a calibration method of an image probe and a shape measuring machine, capable of calibrating the image probe, even when an imaging direction of the image probe is changed.SOLUTION: Each calibration gauge 62 is measured by the image probe 3 and each gauge head 611A, 611B in a state where the imaging direction of the image probe 3 is set vertical, and the relative position relation between the optical axis center of the image probe 3 and each gauge head 611A, 611B is determined. Then, a reference sphere 63 is measured by one of gauge head 611A and 611B, and the position of the reference sphere 63 is registered. Successively, after the imaging direction of the image probe 3 is tilted, the reference sphere 63 is measured by each gauge head 611A, 611B, and the position of each gauge head 611A, 611B on a measuring machine 1 is determined from a measured result and the registered position of the reference sphere 63. Since the relative positional relation between the optical axis center of the image probe 3 and each gauge head 611A, 611B is already acquired, a rotation angle around the optical axis of the image probe 3 and the position of the image probe 3 can be calibrated from the determined position of each gauge head 611A, 611B on a measuring machine 1. |
