发明名称 |
METHOD FOR MANUFACTURING OPTICAL WAVEGUIDE |
摘要 |
An object is to manufacture an optical waveguide having low optical loss, by smoothing the surface of a core. To this end, a method for manufacturing an optical waveguide includes: a core-forming layer formation step of forming a core-forming layer of a photosensitive polymer on a surface of a lower cladding layer formed on a substrate; a smoothing step of smoothing the surface by lowering a surface viscosity thereof through a heat treatment of the core-forming layer; and a photocuring step of forming a core through selective exposure of the smoothed core-forming layer. |
申请公布号 |
EP2269103(A1) |
申请公布日期 |
2011.01.05 |
申请号 |
EP20090734833 |
申请日期 |
2009.04.20 |
申请人 |
PANASONIC ELECTRIC WORKS CO., LTD |
发明人 |
NAKASHIBA, TOHRU;HASHIMOTO, SHINJI;KONDOU, NAOYUKI |
分类号 |
G02B6/138 |
主分类号 |
G02B6/138 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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