COMPOSITION FOR WATER-SOLUBLECOATING LAYER

摘要

PURPOSE: A composition for soluble coating film is provided to improve line edge roughness of photoresist pattern and line width roughness. CONSTITUTION: A composition for soluble coating film contains 1-30 weight% of soluble polymer, 0.1-300 weight parts of acid compound selected from the group consisting of organic acid, inorganic acid and mixture thereof based on 100.0 weight parts of soluble polymer, 0.1-50 weight parts of organic base based on 100.0 weight parts of soluble polymer, and remaining amount of solvent.