发明名称 MECHANICAL CENTERING UNIT AND CENTERING APPARATUS USING THE SAME
摘要 PURPOSE: A mechanical centering unit and a centering apparatus using the same are provided to move an object to a target position with the load of the object and the elastic force of a spring without a power apparatus or a pneumatic cylinder. CONSTITUTION: An object loading part(110) rotates in a vertical direction by the load of a loaded object. A first LM guide(120) is installed at the lower side of the object loading part and forwardly and backwardly moves along the rotation direction of the object loading part. A first spring(130) is installed at the lower side of the first LM guide. A second LAM guide(140) is installed at the lower side of the first spring. A second spring is installed at the lower side of the second LM guide to correct the position of the second LM guide. A centering unit(100) fixes the position of the object.
申请公布号 KR20100136682(A) 申请公布日期 2010.12.29
申请号 KR20090054896 申请日期 2009.06.19
申请人 CLEAN FACTOMATION, INC. 发明人 KANG, SANG HWAN;PARK, JOHG OH;BAE, JAE KEUN
分类号 H01L21/00 主分类号 H01L21/00
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