| 摘要 |
An apparatus for manufacturing capable of reducing footprint and a working time for loading substrates as short as possible, and a method using the same are disclosed. The apparatus includes a cassette to accommodate a plurality of substrates, a stocker in which the cassette is loaded, a process progressing unit to receive the respective substrates in the cassette and to perform a process, a loader having at least two hands and disposed between the stocker and the process progressing unit to receive and supply the respective substrates accommodated in the cassette on the stocker to the process progressing unit, and at least one withdrawing unit to withdraw and supply the respective substrates from the cassette to at least one of the hands in the loader.
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