SUBSTRATE TRANSFERING APPARATUS AND SUBSTRATE PROCESSING SYSTEM HAVING THE SAME

摘要

PURPOSE: A substrate transferring device and a substrate processing system including the same are provided to improve productivity by increasing an exchange speed of a substrate between a process chamber and a transfer chamber. CONSTITUTION: A transfer unit slides on a base. A substrate(W) is supported on the upper side of the transfer unit. A base plate(220) supports the base. A process chamber(100a,100b,100c) includes a substrate support(110) to load the substrate.