ARC ION PLATING APPARATUS

摘要

PURPOSE: The arc ionplating apparatus uses the arc stick of the rod form in the center of the vacuum chamber as the evaporation source. A plurality of cathode electrodes for obtaining the uniform coating layer is omitted and the manufacturing cost of the apparatus is reduced. CONSTITUTION: The vacuum chamber(100) is connected to the exhaust pump(110) and gas supplying nozzle(120). The arc stick(300) locates in the center of the vacuum chamber. It fixes the part and the component mounting large(200) makes maintain. The spinning table is included of the skidding table(500) and magnetoelectricity table(510).