发明名称 |
Surface acoustic wave device, filter device and method of producing the surface acoustic wave device |
摘要 |
A surface acoustic wave device includes a piezoelectric substrate on which resonators having comb-like electrodes are formed; and a silicon substrate that is directly bonded to the piezoelectric substrate and is less expansive than the piezoelectric substrate, a cavity being formed in the silicon substrate and being located below at least one of the resonators.
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申请公布号 |
US2004041496(A1) |
申请公布日期 |
2004.03.04 |
申请号 |
US20030653213 |
申请日期 |
2003.09.03 |
申请人 |
FUJITSU MEDIA DEVICES LIMITED;FUJITSU LIMITED |
发明人 |
IMAI MASAHIKO;MIURA MICHIO;MATSUDA TAKASHI;UEDA MASANORI;IKATA OSAMU |
分类号 |
H03H9/25;H03H3/08;H03H3/10;H03H9/02;H03H9/145;H03H9/64;(IPC1-7):H02N2/00 |
主分类号 |
H03H9/25 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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