发明名称 LIGHT IRRADIATION DEVICE AND LIGHT IRRADIATION METHOD
摘要 PROBLEM TO BE SOLVED: To provide a light irradiation device that can efficiently cure an adhesive layer of an adhesive sheet, and to provide a light irradiation method. SOLUTION: The light irradiation device is configured to adjust an increment in illuminance of light with time at the start of irradiation in accordance with the configuration of the adhesive layer of the adhesive sheet while maintaining the integrated amount of light in a single irradiation cycle at a predetermined quantity. With this configuration, while the amount of light energy applied to the adhesive layer is maintained at a predetermined amount, the intensity of the irradiation light is gradually increased in accordance with the adhesive layer to efficiently cure the adhesive layer. COPYRIGHT: (C)2011,JPO&INPIT
申请公布号 JP2010287813(A) 申请公布日期 2010.12.24
申请号 JP20090141948 申请日期 2009.06.15
申请人 LINTEC CORP 发明人 KAWASAKI YOSHIHIKO
分类号 H01L21/301;H01L33/00 主分类号 H01L21/301
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