| 摘要 |
<p>PURPOSE: It returns the moving body in the maintenance termination to the first location and AS/RS sticks the shelf and stacking apparatus. The isolating time with the shelf and stacking apparatus and adhesion time is shortened. CONSTITUTION: The stacking apparatus sends back the cassette(C) in the interval of a plurality of cassette placement tables(14a) and plurality of shelves. The outer wall panel(22) is arranged in order to surround the outer side surface of the frame(20). The positioning apparatus positions frame in the first location.</p> |
