发明名称 |
COIL, POSITIONING DEVICE, ACTUATOR, AND LITHOGRAPHIC APPARATUS |
摘要 |
A positioning device includes a planar motor having a stator and a translator, one of the stator and the translator including a periodic magnet structure and another of the stator and the translator including at least one coil that is adapted to carry an electric current, wherein the coil includes a wound strip of sheet-like electrically conductive material, and wherein an edge of the coil is provided with a rounded profile.
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申请公布号 |
US2010321664(A1) |
申请公布日期 |
2010.12.23 |
申请号 |
US20100792418 |
申请日期 |
2010.06.02 |
申请人 |
ASML NETHERLANDS B.V. |
发明人 |
MAKAROVIC JURAJ;KOOPS RODY;VAN ZUTPHEN TOM |
分类号 |
G03B27/58;H02K41/02 |
主分类号 |
G03B27/58 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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