发明名称 OPTICAL APERTURE DEVICE
摘要 An optical module includes an aperture device and a support structure supporting the aperture device. The aperture device defines an aperture edge and an aperture plane. The aperture edge is adapted to define a geometry of a light beam passing the aperture device along an optical axis. The support structure is adapted to hold the aperture device in a defined manner when the aperture plane is inclined with respect to a horizontal plane. A temperature distribution prevails within the aperture device and at least one of the aperture device and the support structure is adapted to maintain at least one of a relative position of the aperture edge with respect to the optical axis and a geometry of the aperture edge substantially unaltered upon an introduction of a thermal energy into the aperture device, where the thermal energy being adapted to cause an alteration in the temperature distribution.
申请公布号 KR20100133474(A) 申请公布日期 2010.12.21
申请号 KR20107025215 申请日期 2008.04.11
申请人 CARL ZEISS SMT AG 发明人 BIEG HERMANN;NGUYEN UY LIEM
分类号 G03F7/20;H01L21/027 主分类号 G03F7/20
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