| 发明名称 |
A METHOD AND APPARATUS FOR ACCURATE DETERMINATION OF PARAMETERS OF A STACK OF THIN FILMS |
| 摘要 |
A method for accurate determination of optical parameters of a stack of thin films with at least one of the films being an opaque film. The method includes measurement of the reflected or transmitted through the stack illumination and mutual correlation of the determined thin film parameters. |
| 申请公布号 |
WO2010106533(A3) |
申请公布日期 |
2010.12.16 |
| 申请号 |
WO2010IL00174 |
申请日期 |
2010.03.03 |
| 申请人 |
BRIGHTVIEW SYSTEMS LTD.;FINAROV, MOSHE |
发明人 |
FINAROV, MOSHE |
| 分类号 |
H01L21/31 |
主分类号 |
H01L21/31 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
|
| 地址 |
|
