| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an electronic spectrum measuring method and a measuring instrument which can accurately obtain not only a total amount of a secondary electron to be produced when irradiating a sample with an ion beam, but detailed energy information of the secondary electron to detect as an electronic spectrum, and accurately grasping secondary electron emission characteristics of the sample. <P>SOLUTION: There is provided an electronic spectrum measuring method and the measuring instrument used for the same. The electronic spectrum measuring method includes processes of: selecting ion beam irradiation requirements which practically do not change a surface condition of a measurement sample; irradiating the measurement sample with the ion beam on the basis of the ion beam irradiation requirements selected in the irradiation requirements selection step; and measuring a secondary electronic spectrum emitted from the measurement sample by ion beam irradiation, using a coaxial cylindrical mirror energy analyzer installed in a direction different from an ion beam irradiation axis. <P>COPYRIGHT: (C)2011,JPO&INPIT |
