| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a thermal air flowmeter for reducing the amount of over-temperature changes in a heating resistor so as to changes in the ambient temperature and highly accurately measuring the quantity of air flow regardless of the changes in the ambient temperature, even when thin-film resistors are produced, through the use of a material having a value of a resistance temperature coefficient exceeding 2,000 [ppm/°C]. <P>SOLUTION: In the thermal air flowmeter having a bridge circuit constituted of the thin-film resistors, the thin-film resistors constituting the bridge circuit are constituted of at least two or more types of thin-film resistors 51a, 51b, 52a, 52b, 53, 54, 55, and 60 which have different film thicknesses. <P>COPYRIGHT: (C)2011,JPO&INPIT</p> |
