| 摘要 |
Although flow detection accuracy deterioration due to a subject fluid inflow into a gap between a sensor device and an engaging portion is prevented by an underflow inhibitor, the underflow inhibitor overflow to a sensor device surface results in the subject fluid turbulence, causing a flow element output fluctuation risk. One solution is a configuration comprising a sensor device made of a planar semiconductor material with a heating element and an intake air temperature detection element formed thereon, a support member containing an engaging portion the sensor device is engaged to, which is placed at a passage the subject fluid circulates and underflow inhibitor being filled into a void between the sensor device and the support member to prevent the subject fluid from flowing into the void, and a pooling portion being placed to prevent the under flow inhibitor from overflowing out of the void.
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