发明名称 FLUID HANDLING STRUCTURE, LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
摘要 A fluid handling structure has a plurality of openings acting as a meniscus pinning system operating on the gas drag principle and a gas knife outwardly of the meniscus pinning system to break-up any film of liquid left behind. The separation between the gas knife and the meniscus pinning system is selected from the range of 1 mm to 5 mm. Desirably the underside of a barrier member in which the gas knife and the meniscus pinning system are provided is continuous, e.g. has no openings, between the gas knife and the meniscus pinning system.
申请公布号 US2010313974(A1) 申请公布日期 2010.12.16
申请号 US20100785913 申请日期 2010.05.24
申请人 ASML NETHERLANDS B.V. 发明人 RIEPEN MICHEL;KEMPER NICOLAAS RUDOLF
分类号 F16L55/00 主分类号 F16L55/00
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