发明名称 SILICON MICROPHONE PACKAGE
摘要 A silicon microphone package is provided, including an integrated microphone die having opposing first and second surfaces, a first cover member formed over the first surface of the integrated microphone die to form a first chamber therebetween, and a second cover member formed over the second surface of the integrated microphone die to form a second chamber therebetween.
申请公布号 US2010303271(A1) 申请公布日期 2010.12.02
申请号 US20100786723 申请日期 2010.05.25
申请人 GENERAL MEMS CORPORATION 发明人 WANG YUNLONG
分类号 H04R19/04 主分类号 H04R19/04
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