Sensor, particularly micro-mechanical sensor for capacitive determination of measure, has conversion unit for imaging measure of capacitor, where compensation device is equipped with electrical connection device

摘要

The sensor has a conversion unit (110) for imaging the measure of a capacitor. A compensation device is equipped with an electrical connection device (BC) running parallel to another electrical connection device (B1,B2,BM). The compensation is realized according to a compensation capacitor (Cc1,Cc2) carried out between the two electrical connection devices.