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发明名称
PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD
摘要
申请公布号
KR100997868(B1)
申请公布日期
2010.12.01
申请号
KR20077028247
申请日期
2006.05.30
申请人
发明人
分类号
H05H1/46;H05H1/34
主分类号
H05H1/46
代理机构
代理人
主权项
地址
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