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发明名称
POLISHING SYSTEM COMPRISING A HIGHLY BRANCHED POLYMER
摘要
申请公布号
IL176312(A)
申请公布日期
2010.11.30
申请号
IL20060176312
申请日期
2006.06.14
申请人
CABOT MICROELECTRONICS CORPORATION
发明人
分类号
C09G1/00;C09G1/02
主分类号
C09G1/00
代理机构
代理人
主权项
地址
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