发明名称 METHOD FOR MANUFACTURING THIN FILM TRANSISTOR
摘要 A method for manufacturing a thin film transistor (TFT) is disclosed. The method is achieved by forming and defining a source and a drain of a thin film transistor through two lithographic processes cycles so that the channel length (L) of the thin film transistor can be reduced to 1.5 to 4.0 μm. Besides, the Ion current of the thin film transistor is increased as the channel length (L) is decreased. Therefore, the component area of the thin film transistor is decreased as the channel width (W) is decreased. Thus, the aperture ratio of the TFT-LCD can be increased due to the decreased component area of the thin film transistor.
申请公布号 US2010297817(A1) 申请公布日期 2010.11.25
申请号 US20100849214 申请日期 2010.08.03
申请人 AU OPTRONICS CORP. 发明人 LIU CHANG-WEI
分类号 H01L21/336 主分类号 H01L21/336
代理机构 代理人
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