| 摘要 |
<P>PROBLEM TO BE SOLVED: To reduce a height of a multiaxial angular speed sensor used for various electronic devices. <P>SOLUTION: In the present invention includes the multiaxial angular speed sensor comprising a drive arm connected to a fixing section at one end, and connected to a spindle at the other end, the shape of the drive arm has a folded structure of an arm side, extending in a direction orthogonal to the direction, from the fixing section to the spindle, and a detection electrode has a shape, symmetric with respect to the center (a flexural inflection point) of the arm side, in the extending direction of the arm side. <P>COPYRIGHT: (C)2011,JPO&INPIT |
