发明名称 Method And An Apparatus For Growing A Silicon Single Crystal From A Melt
摘要 Silicon single crystals are grown from the melt by providing the melt in a crucible; imposing a horizontal magnetic field on the melt; directing a gas between the single crystal and a heat shield to a melt free surface, and controlling the gas to flow over a region of the melt free surface extending in a direction substantially perpendicular to the magnetic induction. A suitable apparatus has a crucible for holding the melt; a heat shield surrounding the silicon single crystal having a lower end which is connected to a bottom cover facing a melt free surface and a non-axisymmetric shape with respect to a crucible axis, such that gas which is directed between the crystal and the heat shield to the melt free surface is forced to flow over a region of the melt which extends substantially perpendicular to the magnetic induction.
申请公布号 US2010288185(A1) 申请公布日期 2010.11.18
申请号 US20100765896 申请日期 2010.04.23
申请人 SILTRONIC AG 发明人 FILAR PIOTR
分类号 C30B15/14;C30B15/10;C30B15/20 主分类号 C30B15/14
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