| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a both-sided adhesive tape for fixing polishing cloth with high contactness with a surface plate capable of being released without generating peeling during polishing and with hardly leaving any adhesion residue, and a polishing cloth laminated body using the adhesive tape. <P>SOLUTION: This adhesive tape has an adhesive layer laminated with a release sheet subjected to a mold release treatment in at least a surface of a base material. The release sheet has arithmetic average roughness (Ra) of a surface in contact with the adhesive layer of 0.1 μm or below. In the adhesive layer, a shearing storage elastic modulus (G') in a measured frequency 10 Hz is 4×10<SP>5</SP>to 1×10<SP>7</SP>Pa at 20°C and 3×10<SP>4</SP>to 1×10<SP>6</SP>Pa at 80°C. The adhesive tape has no inflection point in a dissipation rate (tanδ) that a shearing loss elastic modulus (G'') is divided by the shearing storage elastic modulus (G') at the same measured temperature at 20 to 80°C. <P>COPYRIGHT: (C)2011,JPO&INPIT |
