GAS SENSORS USING METAL OXIDE NANOPARTICLE AND FABRICATION METHOD

摘要

PURPOSE: A gas sensor using metal oxide nanoparticle, and a manufacturing method thereof are provided to increase the reaction speed of a ppb level by forming a sensor element with thin metal-oxide layers. CONSTITUTION: A gas sensor using metal oxide nanoparticle comprises a sensor element of a thin layer and a sensor substrate. The sensor element of the thin layer is formed on the sensor substrate on which electrode is formed. The sensor element of the thin layer is formed by the spraying of the solution in which the metal oxide nanoparticle is dispersed.