| 摘要 |
PROBLEM TO BE SOLVED: To provide a laser oscillator that is free of malfunction due to noise in spite of generation of a sticking discharge, and is prevented from having a shorter lifetime owing to damage to an electrode by detecting the sticking discharge rapidly. SOLUTION: The laser oscillator detects a sticking discharging current flowing between a secondary side of a transformer 5 applying a high-frequency high voltage to an oscillator electrode, and an oscillator housing, multiplies the detected value by a rectangular wave signal for control of an inverter circuit 3 supplying a high-frequency voltage to a discharge electrode, removes an AC component from the multiplication result, and determines whether the sticking discharge is generated from the value obtained as a result. COPYRIGHT: (C)2011,JPO&INPIT
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