TEMPLATE, METHOD OF MANUFACTURING THE SAME, AND METHOD OF FORMING PATTERN

摘要

PROBLEM TO BE SOLVED: To provide a template in which the gap region of a substrate to be processed can be covered with an imprint resist uniformly with good reproducibility, a method of manufacturing the same, and to provide a method of forming a pattern. SOLUTION: The method of manufacturing the template used in an optical imprint method includes: forming a pattern for imprinting in a pattern forming region 14 on a substrate 10; forming a resist film 11 in the pattern forming region 14; carrying out anisotropic etching using the resist film 11 as a mask to form a first step portion 13b and a first side portion 13a that connects the pattern forming region 14 and the first step portion 13b; forming a resist film 12 in the pattern forming region 14 and an outer peripheral portion 14b surrounding the pattern forming region 14 after removing the resist film 11; and carrying out wet etching using the resist film 12 as a mask to form a second step portion 13d and a curved second side portion 13c that connects the first step portion 13b and the second step portion 13d. COPYRIGHT: (C)2011,JPO&INPIT