| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a solvent gas treatment device always carrying out accurate and stable evaluation of a treatment capacity of a volatile organic compound, and simplifying a configuration. <P>SOLUTION: The solvent gas treatment device includes a nozzle hole 129 having a port blowing out solvent gas vaporized by a vaporizing tube 121, a blower A 136 supplying dilution gas to be mixed with the solvent gas, a solvent gas generator 100 supplying solvent liquid to the heated vaporizing tube by a pump to carry out heating vaporization and to provide the solvent gas and generating diluted solvent gas by mixing the dilution gas supplied by the blower A 136 with the solvent gas blown out of the nozzle hole, and a solvent gas treatment device body 200 treating treatment reception gas. Evaluation operation of the treatment capacity of the solvent gas of the solvent gas treatment device body by supply of the diluted treatment gas, and treatment operation of the treatment reception gas by supply of the treatment reception gas can be carried out, and the treatment reception gas is supplied to the solvent gas treatment device body by the blower A 136. <P>COPYRIGHT: (C)2011,JPO&INPIT |
