STAGE DEVICE FOR 3-AXES

摘要

PURPOSE: A 3-axis stage device is provided to keep Y-axis stages of two sides stationary by offsetting the pressure acting on a counter balance with the weights of the X- and Z-axis stages. CONSTITUTION: A 3-axis stage device(100) comprises Y-axis stages(120,120a), a Z-axis stage(130), and an X-axis stage(140). The Y-axis stages having inclined surface(121) facing each other are installed on both sides of a base(110) and reciprocate in an Y-axis direction. The Z-axis stage contacts the inclined surfaces of the Y-axis stages and is raised and lowered by the reciprocating motion of the Y-axis stages. The X-axis stage is installed on the Z-axis stage and reciprocates in an X-axis direction.