发明名称 |
ILLUMINATING APPARATUS AND METHOD FOR CONTROLLING ENERGY OF A LASER SOURCE |
摘要 |
The disclosure relates to an illuminating apparatus for illuminating a sample on a work stage, optionally with a relatively narrow illuminating line of relatively controlled energy, as well as methods for controlling energy of a laser source when illuminating a sample on a work stage with a relatively narrow illuminating line. |
申请公布号 |
EP2245497(A1) |
申请公布日期 |
2010.11.03 |
申请号 |
EP20090709143 |
申请日期 |
2009.01.22 |
申请人 |
CARL ZEISS LASER OPTICS GMBH;CYMER, INC. |
发明人 |
WEIGL, BERNHARD;SANDSTROM, RICHARD |
分类号 |
G02B27/09;B23K26/06;B23K26/073;B23K26/70;H01S3/13 |
主分类号 |
G02B27/09 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|